Semiconductor Inspection
Semiconductors are a vital part of modern electronics and require high quality to function effectively. Inspection enables improved quality and yield when creating these components. In complex processes requiring precise inspection and metrology, Reliant Systems, Inc. develops high-precision motion stages, comprising an integral part of semiconductor production.
Featured Semiconductor Inspection Stages
ABLM Series Air Bearing Stages
Our ABLM Series Air Bearing stages are non-contact solutions offering higher accelerations, speeds, velocity stability, accuracy, and repeatability than traditional rolling element bearings. The non-contact nature of air bearings eliminates the need for lubrication and its associated maintenance requirements...
Travel | 200 mm x 200 mm |
Accuracy | ±4.0 µm (uncompensated) |
Bi-Directional Repeatability | ±150.0 nm |
LSN Series Stages
The LSN Series is a highly versatile line of compact linear motion stages that can withstand continuous and rigorous duty cycles. It is configurable with stepper, rotary servo, or linear servo motors, and a variety of feedback options to prioritize the velocity and accuracy demands of the application...
Travel | 50 – 400 mm |
Linear Accuracy | ±3.0 µm (50 mm travel) |
Bi-Directional Repeatability | ±0.4 – 0.5 µm |
LP300E & LP400E XY Stages
The LP300E and LP400E low-profile stages are for applications requiring aesthetics and compactness. Often used in inspection or optical metrology instruments where the stage is fully visible to the user, we have designed these stages to look as good as they perform...
Travel | 304 – 410 mm |
Linear Accuracy | ±6.0 µm |
Bi-Directional Repeatability | ±0.5 µm |
RSR Series Direct Drive Rotary Stages
Our RSR series is a high-precision, low-profile rotation stage driven directly by a brushless motor instead of a belt drive or worm gear. A preloaded, circular crossed roller bearing gives the RSR good stiffness and load capacity within a low profile...
Travel | 360° |
Rotational Accuracy | ±10 arcsec |
Bi-Directional Repeatability | ±1.5 arcsec |
Protecting Performance: Inspection & Metrology
Wafer inspection and metrology are essential to semiconductor manufacturing, supporting quality control, yield improvement, and process validation throughout production. High-precision motion stages provide the nanometer-level accuracy and smooth, vibration-free movement needed to position wafers under sensors, microscopes, and probes—often in cleanroom environments. Common applications include…
- Defect Inspection: Enables scanning for particles, scratches, and pattern defects using optical or e-beam systems.
- Critical Dimension (CD) Metrology: Measures feature sizes like lines and vias with sub-nanometer precision.
- Overlay Measurement: Aligns successive lithography layers by repositioning wafers across multiple sites.
- Surface & Thickness Analysis: Supports tools like AFMs or interferometers to assess surface topography and film thickness.
- Automated Optical Inspection (AOI): Uses high-speed imaging and stage motion for full-wafer defect detection.
Motion systems are vital in ensuring consistent, high-resolution measurements across all inspection and metrology tasks.
Challenges in Semiconductor Inspection
While this process is vital to production, it is difficult for various reasons, including:
- Miniaturization: As technologies advance, they get smaller, so today's inspection solutions require nanometer precision.
- Complexity: While chips shrink in size, their complexity grows. They contain layers of components and billions of transistors.
- Importance: These technologies require high precision, as one defect in a semiconductor could lead to the failure of electronic devices.
These challenges create further difficulties, including production efficiency and product quality. Manufacturers must balance both factors as they develop inspection systems.
Our Solutions in Advanced Semiconductor Manufacturing
We deliver high-precision motion solutions that empower the accuracy, speed, and reliability of today’s most advanced semiconductor inspection systems. Our XY stages provide precise planar motion for full wafer and chip surface scanning, while Z-axis and lift stages enable accurate vertical positioning for imaging and measurement. Air bearing stages offer ultra-smooth, frictionless motion ideal for cleanroom environments. We also supply linear stages for high-speed, single-axis movement in wafer handling and rotary stages for precise angular alignment in applications like lithography, inspection, and surface profiling—ensuring complete, high-performance motion control across semiconductor processes.
Why Invest in High-Precision Motion Stages?
This equipment enhances processes by delivering greater accuracy and precision. Motion stages position components exactly as needed for any testing method, while also accelerating inspection times for more efficient data collection. Ultimately, integrating motion stages into your workflow boosts yield rates by increasing the percentage of high-quality, defect-free units.
When you partner with us for your precision motion stages, you gain access to a wealth of experience. Founded in 2004, we have produced cutting-edge automation systems for decades, and we're ready to put our expertise to work for you. We also maintain an ISO 7 cleanroom, ensuring the high degree of product quality and safety your application requires. This same cleanroom supports our precision contract manufacturing services for customers who need build-to-print production solutions. We develop strategic, long-term partnerships with our customers, serving as a dedicated source of support.
Optimize Semiconductor Inspection With Our Stages
The chip manufacturing process includes hundreds of steps. Inspection helps maintain quality at all critical stages for the development of a functional product. Build an effective system using our stages for high-precision positioning. Learn more about our solutions or get a quote by contacting us online.
