This 200mm x 200mm XY stage is an example of an OEM assembly based on our CS crossed roller bearing stage series.  In place of the standard anodized aluminum, a nickel coating is used to make the assembly safe for ESD sensitive microelectronic components.  The two axes are aligned orthogonally to better than ±5 arcsec (±25μrad).  IMS MDrive step motors with integrated controllers simplify system integration, with only power and RS422/485 serial communication required for closed loop positioning to the 0.5μm resolution linear encoders.  A power and serial communication output are provided on the connector panel to support an MDrive equipped Z axis stage.  A similar stage assembly with standard 2 phase stepper motors without integrated controllers is also being produced.

NOTE: If you are looking for tighter specs and tolerances, we can customize to your needs.