5 Axis Metrology Platform
This motion platform consists of three linear and two rotary stages. All 5 axes feature direct mounted position encoders to achieve a 3-Sigma bidirectional repeatability of better than ±0.3μm for the linear axes, and ±2 arc-sec for the rotary axes. X-Y-Z travel is 4 x 4 x 2 inches, Theta is 270°, and Phi is 360°. The X and Y stages are based on our CS crossed roller bearing series, with extra-long bearing cages used to keep angular errors to a minimum. Z is a mini Z-column, eliminating the need for an angle bracket and reducing the cantilever of the sensor head. Theta and Phi are direct encoded versions of the PR worm gear driven rotary stages with a resolution of 0.0001°. Due to the sensitivity of the measurement technique, motor power is turned off between moves making the ability of the worm drives to hold position a desirable feature. Since the travel of Theta is limited to 270°, all supporting cables for Phi are able to be routed through the center aperture of Theta.
In place of the standard anodized aluminum, a nickel coating can be used to make the assembly safe for ESD sensitive microelectronic components. All five axes are mounted and aligned to one another on a customer specified granite surface plate. The full assembly is placed on a vibration isolation frame and shipped to the customer in a reusable crate designed to accommodate the completed system.
NOTE: If you are looking for tighter specs and tolerances, we can customize to your needs.
Capabilities
Reliant Systems, Inc. is a vertically integrated designer and manufacturer of high precision linear and rotary positioning stages. We specialize in custom, easy to integrate OEM motion assemblies that have been designed for a customer's specific application.
Engineering/Design
Engineering/ Design
Custom OEM precision motion assemblies are our specialty. We have the knowledge, experience, tools, and flexibility to offer application specific assemblies comprised of standard products or completely unique designs. Reliant Systems clients can communicate directly with our engineers to ensure an iterative dialogue exists throughout the design process. This will ensure that your motion solution fits seamlessly into your system and that we hit your motion and cost goals.
Design tools:
- SOLIDWORKS 3D CAD
- SOLIDWORKS Simulation Professional
- SOLIDWORKS Motion
Custom / Contract Manufacturing
Custom / Contract Manufacturing
Besides manufacturing products of our own design, we also offer build-to-print contract manufacturing for customers who have their own design and want to outsource production. Our expertise and experience building precision motion hardware, along with our ability to measure performance will ensure that what we build will meet all specifications. The designs that we manufacture for customers range from high precision linear motor X-Y-Θ stage assemblies for high speed wafer inspection to simple XY and rotary stages used in desktop analytical instruments. Also, to save time and money, when one of our standard stages is close to being the right solution for a customer’s application, our experienced engineering team can make a few modifications to make it the perfect solution.
We can also take it a step further by incorporating our finished product(s) into a customer's complete design and provide them with their final tested and certified product.
Precision Machining
Precision Machining
To eliminate the traditional long lead times and overseas quality issues seen industry wide, Reliant Systems has invested in a subsidiary company to vertically integrate and bring all machining in-house. Dynamic Precision Manufacturing has several mills, turning centers, precision grinders, and measuring tools to ensure the highest precision parts are produced for RSI's motion products. From parts manufacturing through the build process, we use the highest quality components in the industry from the most respected brands.
Manufacturing:
- Shorter lead times being vertically integrated
- Strict adherence to quality control and inspection
- Flexibility to do one-off prototypes to high quantity production runs
Build
Build Process
From manufacturing the parts, through the assembly/build process, we use skilled and experienced technicians along with a controlled network to ensure only current release documentation is being used for every step. Tolerances can add up unless you pay attention, so all of our workstations include A grade granite surface plates, squares, and parallels along with high res electronic indicators to track critical dimensions throughout the process to minimize any additive errors. Our application engineering team will ensure that your project or application build is completed to your specifications.
Build competency:
- All supporting docs on controlled network
- Preload and tolerance testing
- Cost and schedule targets
Test
Testing
Performance validation is a proven process with Reliant Systems. The investment in several metrology tools ensures every motion assembly meets exacting standards. 100% of our products shipped have been tested to conform to our customers specifications. RSI is a market leader in reliability and quality having won several OEM supplier awards with some of the semiconductor industry leaders.
Test protocols:
- Supporting test results docs
- Linear: yaw, pitch, straightness and flatness of travel, accuracy, and bidirectional repeatability
- Rotary: radial and axial error, wobble, rotation position accuracy, and position repeatability