200mm x 200mm X-Y OEM Stage

Crossed Roller Bearing

200mm x 200mm X-Y OEM Stage

This 200mm x 200mm stage is an example of an OEM assembly based on our CS crossed roller bearing stage series. In place of the standard anodized aluminium, a nickel coating is used to make the assembly safe for ESD sensitive microelectronic components. The two axis are aligned orthogonal to better than ±5 arc-sec (±25μrad). IMS MDrive step motors with integrated controllers simplify system integration, with only power and RS422/485 serial communication required for closed loop positioning to the 0.5μm resolution linear encoders. A power and serial communication output are provided on the connector panel to support an MDrive equipped Z axis stage. A similar stage assembly with standard 2 phase stepper motors without integrated controllers is also being produced.

CS 300 Drawing

 

200mm x 200mm X-Y OEM Stage Specifications Sheet